中文摘要：双光子聚合系统已被用于制造三维纳米和微米级器件多年。然而，仍有一些重要问题需要解决。其中之一是双光子聚合理论和光学衍射理论的结合。基于双光子聚合理论，分析了激光的点扩散函数，以便在微加工中有效地处理它们的分布模型。在激光束中引入衍射超分辨率元件，以重新排列焦点的点扩散函数。最后，将衍射超分辨率元件与双光子聚合实验相结合。
英文摘要：Two-photon polymerization system has been used to fabricate the 3-D nano- and microscale devices for several years. However, there are still some important issues to be resolved. One of them is the combination of the two-photon polymerization theory and the optical diffraction theory. Based on the two-photon polymerization theory, the laser’s point spread function is analyzed so that their distribution models can be efficiently processed in micromachining. Diffractive superresolution element is introduced in the laser beam to rearrange the point spread function of the focus. Finally, the combination of the diffractive superresolution element and two-photon polymerization experiments are performed.
